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YÖK Açık Bilim - CoHE Open Science
Master thesis . 2021
License: CC BY
Data sources: YÖK Açık Bilim - CoHE Open Science
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Anadolu Üniversitesi Akademik Arşiv Sistemi
Master thesis . 2015
Data sources: Anadolu Üniversitesi Akademik Arşiv Sistemi
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Claim

GaSb alttaş üzerine kaliteli GaSb epi-katmanların büyütülmesi ve karakterizasyonu

descriptionPublicationkeyboard_double_arrow_right Master thesis 09 Nov 2015 Turkey Turkish Publisher:Fen Bilimleri Enstitüsü
Authors: Şahin, Seval;

handle: 11421/5173

GaSb alttaş üzerine kaliteli GaSb epi-katmanların büyütülmesi ve karakterizasyonu

Abstract

Moleküler demet epitaksi yöntemiyle, farklı büyütme ve soğutma parametreleri kullanılarak, GaSb alttaş üzerine GaSb epikatman yapılar büyütülerek karakterizasyonları yapılmıştır. Büyütme ve soğutma parametrelerinin kristal kalitesine ve örnek yüzeyine etkisi incelenmiştir. Büyütme sonrasında uygulanan soğutma sürecinde kullanılan Sb akı miktarının ve Sb akısının sonlandırıldığı alttaş sıcaklık değerinin epikatmanların yüzeylerinde önemli etkileri olduğu belirlendi. Ayrıca, epikatman yüzey kalitesinin aygıt haline getirilme sürecinde tanımlanan mesa yapılarının aşınma profillerine etkisi olduğu tespit edildi ve bu sorun için çözüm üretildi.

Anadolu Üniversitesi, Fen Bilimleri Enstitüsü, Fizik Anabilim Dalı

Tez (yüksek lisans) - Anadolu Üniversitesi

Kayıt no: 1036802

Country
Turkey
Related Organizations
Keywords

Moleküler demet epiteksi, Fizik ve Fizik Mühendisliği, Physics and Physics Engineering, Galyum arsenür yarıiletkenler

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
Green