
handle: 11311/765412
We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement.
MEMS, PML, interface, resonators
MEMS, PML, interface, resonators
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