
handle: 11311/545661
The effect of coatings and superficial oxide on the behavior of micro resonators deserves attention in view of its impact on real-life devices. To this purpose, in this work we focus on the thermoelastic damping in layered thin resonating beams. Including the effect of thermally imperfect interfaces, the quality factor is analytically computed. The results obtained are discussed and compared with available data.
Microelectromechanical systems; thermoelastic damping; layered resonators.
Microelectromechanical systems; thermoelastic damping; layered resonators.
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 0 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
