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Novel structures and materials for microelectromechanical system (MEMS) devices

descriptionPublicationkeyboard_double_arrow_right Thesis 17 Sep 2008 Singapore
Authors: Low, Duong Sin.;

handle: 10356/4810

Novel structures and materials for microelectromechanical system (MEMS) devices

Abstract

In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.

Master of Engineering

Country
Singapore
Related Organizations
Keywords

DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems, 620

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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