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To establish a quality management system (QMS) for cleanroom wafer processes

descriptionPublicationkeyboard_double_arrow_right Thesis 20 Oct 2008 Singapore English
Authors: Mok, Hiang Teck.;

handle: 10356/13508

To establish a quality management system (QMS) for cleanroom wafer processes

Abstract

This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) which is a Research and Development (R&D) institute under the Economic Development Board (EDB) of Singapore.

Master of Science (Precision Engineering)

Country
Singapore
Related Organizations
Keywords

DRNTU::Engineering::Manufacturing::Clean room, DRNTU::Engineering::Manufacturing::Quality control

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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