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handle: 10261/94413
La invención se refiere a un procedimiento de deposición de calcogenuros con control de la presión de gas mediante activación pulsada y continua de una válvula en la fuente de gas calcógeno. Gracias a la aplicación de estos pulsos se puede controlar la presión en la cámara de manera que la estequiometría es fácilmente controlable, mientras que se puede prescindir de válvulas complicadas.
Centro de Investigaciones Energéticas, Medioambientales y Tecnológicas, Cosnejo Superior de Investigaciones Científicas (España)
A1 Solicitud de patente con informe sobre el estado de la técnica
Peer reviewed
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