Electron-beam deposited boron coatings for the extreme ultraviolet

descriptionPublicationkeyboard_double_arrow_right Article 21 May 2008 English Publisher:Optica Publishing GroupJournal:Applied Optics, volume 47, page 2,926 (issn: 0003-6935, eissn: 1539-4522,

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Authors: Vidal-Dasilva, M.; Fernández Perea, Mónica; Méndez, José Antonio; Aznárez, José Antonio; Larruquert, Juan Ignacio;

doi: 10.1364/ao.47.002926

pmid: 18516108

handle: 10261/78914

Electron-beam deposited boron coatings for the extreme ultraviolet

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Abstract

Boron films deposited by evaporation with an electron-beam were found to have a relatively high reflectance in the extreme ultraviolet with values similar to those of ion-beam-sputtered (IBS) SiC and IBS B(4)C. The largest reflectance was measured for an 11 nm thick boron film. Some reflectance degradation was observed for boron films stored in a desiccator. Reflectance degradation varied from sample to sample and was found to be either similar to that of IBS SiC and IBS B(4)C or larger.

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Spanish National Research Council
Spain

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