Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO2

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 25 Jun 2012 Belgium, Germany English Publisher:AIP PublishingJournal:Applied Physics Letters, volume 100, page 263,113 (issn: 0003-6951, eissn: 1077-3118,

Copyright policy )Funded by:EC | AL-NANOFUNC

Authors: Gontard, Lionel C.; Jinschek, Joerg R.; Ou, Haiyan; Verbeeck, Jo; Dunin-Borkowski, Rafal;

doi: 10.1063/1.4731765

handle: 10261/56449 , 10067/1003370151162165141

Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO2

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Abstract

A focused electron beam in a scanning transmission electron microscope (STEM) is used to create arrays of core-shell structures in a specimen of amorphous SiO2 doped with Ge. The same electron microscope is then used to measure the changes that occurred in the specimen in three dimensions using electron tomography. The results show that transformations in insulators that have been subjected to intense irradiation using charged particles can be studied directly in three dimensions. The fabricated structures include core-shell nano-columns, sputtered regions, voids, and clusters

Work funded under EC FP7 project Al-NanoFunc

Peer reviewed

5 páginas

Countries

Belgium, Germany

Related Organizations

Spanish National Research Council
Spain
Technical University of Denmark
Denmark
Helmholtz Association of German Research Centres
Germany
University of Antwerp
Belgium
Institute of Materials Science
Spain

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Keywords

Physics, electron irradiation, transmission electron microscopy, voids, nanofabrication, Ge-doped SiO2, Electron irradiation, info:eu-repo/classification/ddc/530, glasses

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