A wireless LC chemical sensor based on a high quality factor EIS capacitor

descriptionPublicationkeyboard_double_arrow_right Article 01 Oct 2007 English Publisher:Elsevier BVJournal:Sensors and Actuators B: Chemical, volume 126, pages 648-654 (issn: 0925-4005,

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Authors: García-Cantón, Jesús; Merlos Domingo, Ángel; Baldi Coll, Antonio;

doi: 10.1016/j.snb.2007.04.025

handle: 10261/52454

A wireless LC chemical sensor based on a high quality factor EIS capacitor

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Abstract

This paper reports on the concept, design, fabrication andexperimental results of a new passive wireless sensor for pH measurements. Thesensor is based on a LC resonator formed by an inductor and an EIS (Electrolyte-Insulator-Silicon) capacitor working as a pH-to-capacitance transductor. Areference electrode is used to obtain a stable DC potential at the electrolyte.An additional comb-like electrode located on the surface of the insulator isalso provided to obtain a low AC impedance. Using this double-electrode scheme aQ larger than 15 is achieved for a wide range of conductivities. wireless measurements of the LC sensor yields a sensitivity of 1.0% frequency change perpH unit.

MEC-DGI Ref: TEC2004-00068 (MIQUIN)

Peer reviewed

Related Organizations

Spanish National Research Council
Spain
Centro Nacional de Microelectrónica
Spain

Keywords

LC sensor, EIS capacitor, Wireless sensor, Chemical sensor, Photoinjection

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