AbstractDiamond like carbon (DLC) thin films have been exposed to different nitrogen containing plasmas. A dielectric barrier discharge (DBD) at atmospheric pressure and a microwave discharge (MW) at low pressure using N2 and mixtures Ar + NH3 have been compared. Optical Emission and X‐ray Photoelectron spectroscopies, Atomic Force Microscopy and contact angle measurements have been used for this study. A DBD with Ar + NH3 is the most efficient method for DLC functionalization. Films treated with this plasma presented the highest concentration of amine groups as determined by derivatization with 4‐chlorobenzaldehyde. All the treated samples underwent a significant aging with time. The efficiency of the different plasmas for DLC functionalization is discussed in the light of the intermediate species detected in the plasma.magnified image