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SU-8 cantilever sensor system with integrated readout

descriptionPublicationkeyboard_double_arrow_right Article 01 Sep 2005 Spain English Publisher:Elsevier BVJournal:Sensors and Actuators A: Physical, volume 123-124, pages 111-115 (issn: 0924-4247, Copyright policy )
Authors: Johansson, A.; Calleja, Montserrat; Rasmussen, P. A.; Boisen, Anja;

doi: 10.1016/j.sna.2005.03.025

handle: 10261/35675

SU-8 cantilever sensor system with integrated readout

Abstract

We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols.

European Communities through MERG-CT-2004-510638

Peer reviewed

Country
Spain
Related Organizations
Keywords

Cantilevers, Biosensors, Electroplating, Piezoresistive readout, SU-8

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
views
OpenAIRE UsageCountsViews provided by UsageCounts
71
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