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Method for obtaining coatings by means of cathode sputtering and resulting coating

Authors: Fernández-Camacho, A.; Godinho, Vanda;

Method for obtaining coatings by means of cathode sputtering and resulting coating

Abstract

[ES] El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y asi controlar la fonnación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas detenninadas caracteristicas ópticas como reílectividad y indice de refracción variable. El método pennite controlar el indice de refracción manteniendo otras propiedades caracteristicas del material como composición quimica, resistencia mecánica y propiedades eléctricas.

[EN] The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the fonnation of nano-bubbles in the microstructure of the coating obtained, producing predetennined optical characteristics such as variable refractive index and reílectivity. The method allows refractive index to be controlled, while other characteristic properties ofthe material are maintained, such as chemical composition, mechanical strength and electric properties.es|ut

A2 Solicitud de patente sin informe sobre el estado de la técnica

Consejo Superior de Investigaciones Científicas (España)

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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