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handle: 10261/31228
A nanometer-sized ethyl alcohol meniscus induced between a conductive atomic force microscope tip and a silicon surface (see Figure) allows the fabrication of nanodots or nanowires of SiCx at a predetermined position on the substrate. The meniscus size and kinetic parameters control the nanostructure size.
This work was supported by Ministerio de Educacion y Ciencia (Spain) contract number MAT2003-02655 and the European Commission, contract number NAIMO Integrated Project No NMP4-CT-2004-500355.
4 páginas, 3 figuras.
Peer reviewed
Lithography, inorganic, Nano, Nanostructures
Lithography, inorganic, Nano, Nanostructures
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