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Método para definir y fabricar motivos superficiales nanométricos químico reactivos mediante litografía blanda en fase gaseosa, motivos y dispositivos así obtenidos y sus aplicaciones

Authors: Rica Quesada, Roberto de la; Fernández Sánchez, César; Baldi Coll, Antonio; Domínguez, Carlos; Jiménez-Jorquera, Cecilia;

Método para definir y fabricar motivos superficiales nanométricos químico reactivos mediante litografía blanda en fase gaseosa, motivos y dispositivos así obtenidos y sus aplicaciones

Abstract

Método para definir y fabricar motivos superficiales nanométricos químico reactivos mediante litografía blanda en fase gaseosa, motivos y dispositivos así obtenidos y sus aplicaciones. El método propuesto en esta patente de invención permite definir y fabricar sobre obleas de silicio monocristalino u otro material semiconductor o superficie sólida, un motivo químico reactivo previamente proyectado o una serie de ellos, preferentemente una molécula de silano como el MPTMS y APTMS con un grupo tiol y amino funcional expuesto, respectivamente. Estos soportes funcionalizados a nivel nanométrico pueden ser utilizados para la fabricación de dispositivos microelectrónicos o biotecnológicos como, por ejemplo, un microarray o microchip de DNA o PNA.

Fecha de solicitud:30.07.2009.- Titular: Consejo Superior de Investigaciones Científicas (CSIC)

Consejo Superior de Investigaciones Científicas (España)

B1 Patente sin examen previo

Peer reviewed

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
Green