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Plasma reactor

Authors: Molina Mansilla, Ricardo; Erra Serrabasa, Pilar; Bertrán, Enric;
Abstract

[ES] Se trata de un reactor de plasma que puede trabajar en un amplio rango de presión, desde el vacío y presiones reducidas hasta la presión atmosférica y presiones superiores. Adicionalmente el reactor de plasma tiene la capacidad de regular otros parámetros importantes y permite su uso para el tratamiento de muestras de tipología muy diversa, como por ejemplo las de tamaño relativamente grande o de superficie rugosa.

[EN] A plasma reactor that can operate in a wide pressure range, from vacuum and low pressures to atmospheric pressure and higher pressures. The plasma reactor is also able to regulate other important settings and can be used for processing a wide range of different samples, such as relatively large samples or samples with rough surfaces.

Filing Date: (2009-11-17).-- Priority Data: ES P200803269 (2008-11-17).-- Titular: Consejo Superior de Investigaciones Científicas (CSIC).

A1 Solicitud de patentes con informe sobre el estado de la técnica

Consejo Superior de Investigaciones Científicas (España)

Peer reviewed

Keywords

Vacuum, Vacío, Reactor de plasma, Plasma reactor

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selected citations
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This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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