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System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers

Authors: Lechuga, Laura M.; Álvarez, Mar; Tamayo de Miguel, Francisco Javier;

System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers

Abstract

[ES] La invención relaciona a un sistema y a un método para detectar el desplazamiento, tal como la deflexión, de una pluralidad de los elementos (1), por ejemplo los microcantilevers, parte formadora de una agrupación (2), emitiendo una haz de luz (4) hacia la agrupación (2) y recibiendo una haz de luz reflejada en un detector de posición óptico, por el que la posición de la incidencia de la haz de luz sea determinada por el desplazamiento del elemento correspondiente. El sistema más futuro comprende: medio de exploración (7) para desplazar la haz de luz (4) a lo largo de la agrupación (2) para reflejar la haz de luz secuencialmente, por los elementos individuales (1) a lo largo de la agrupación dicha (2) y medio de detección de la reflexión (11) para detectar cuando la haz de luz es reflejada por un elemento. El sistema está dispuesto para cuando el medio de detección de la reflexión (11) detecta que la haz de luz es reflejada por un elemento, tener la posición correspondiente de la incidencia de la luz en el detector como indicación del desplazamiento del elemento.

[EN] The invention relates to a system and method for detecting the displacement, such as the deflection, of a plurality of elements ( 1 ), such as microcantilevers, forming part of an array ( 2 ), by emitting a light beam ( 4 ) towards the array ( 2 ) and by receiving a reflected light beam on an optical position detector, whereby the position of incidence of the light beam is determined by the displacement of the corresponding element. The system further comprises: scanning means ( 7 ) for the displacing the light beam ( 4 ) along the array ( 2 ) so that the light beam is sequentially reflected, by the individual elements ( 1 ) along said array ( 2 ); and reflection detecting means ( 11 ) for detecting when the light beam is reflected by an element.; The system is arranged so that when the reflection detecting means ( 11 ) detect that the light beam is reflected by an element, the corresponding position of incidence of the light on the detector is taken as an indication of the displacement of the element.

Fecha de solicitud: 23-10-2008.- Titular: Consejo Superior de Investigaciones Científicas (CSIC)

Peer reviewed

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
Green