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Impact of La Concentration on Ferroelectricity of La-Doped HfO2 Epitaxial Thin Films

Authors: Tingfeng Song; Huan Tan; Romain Bachelet; Guillaume Saint-Girons; Ignasi Fina; Florencio Sánchez;

Impact of La Concentration on Ferroelectricity of La-Doped HfO2 Epitaxial Thin Films

Abstract

Epitaxial thin films of HfO2 doped with La have been grown on SrTiO3(001) and Si(001), and the impact of the La concentration on the stabilization of the ferroelectric phase has been determined. Films with 2-5 at. % La doping present the least amount of paraelectric monoclinic and cubic phases and exhibit the highest polarization, having a remanent polarization above 20 μC/cm2. The dopant concentration results in an important effect on the coercive field, which is reduced with increasing La content. Combined high polarization, high retention, and high endurance of at least 1010 cycles is obtained in 5 at. % La-doped films.

Countries
Spain, Spain
Keywords

Silicon, Ferroelectric oxides, Ferroelectricity, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Thin films, Monoclinic phase, Paraelectrics, Lanthanum, Polarization, Epitaxial oxide on silicon, Epitaxial growth, Semiconductor doping, Silicon compounds, Ferroelectric HfO2, Epitaxial oxides on silicon, Thin-films, Ferroelectric films, La doping, Ferroelectric phasis, Ferroelectric HfO 2, Epitaxial HfO 2, Hafnium oxides, Strontium titanates, Epitaxial thin films, Epitaxial HfO2, Titanium compounds

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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60
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70
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