The growth of nanostructured ZnO thin films on nanoporous anodic alumina substrates (NAAF) by dc reactive magnetron sputtering using a pure Zn metal target is reported. ZnO nanostructures reproduce the pore arrays of the NAAF substrates used as templates mimicking their hexagonal long range order. Stoichiometric nanostructured ZnO samples were grown with wurtzite type structure, highly textured and oriented in the (002) direction. The study of the NAAF pore size effect in the final morphology and optical properties of the nanostructured ZnO is presented for different ZnO thicknesses. The pore size of the nanostructured ZnO films was controlled in the range of 15–65 nm by choosing appropriate NAAF and the sputtering deposition conditions. The broademission band observed in PL spectra of the samples should be associated with color centers transitions (F and H centers) appearing in the alumina templates.

Ministerio de Ciencia e Innovación MAT2010-20798-C05-03

Ministerio de Ciencia e Innovación CSD2008-00023