In my invited talk, I will present an overview of the applications of nanofabrication by means of focused electron and ion beams. Particularly, I will highlight the interest of Focused Ion Beam Induced Deposition (FIBID) for the growth of nano-superconductors and the interest of Focused Electron Beam Induced Deposition (FEBID) for the growth of magnetic nanostructures. The competitive advantages of FEBID and FIBID will be described: singlestep nanolithography technique on a wide variety of substrates, with high-resolution (around 10 nm) and with capability for the growth of three dimensional nanostructures. The image sketches how FEBID and FIBID work.

Resumen del trabajo presentado a la 12th International Conference on Physics of Advanced Materials (ICPAM), celebrada en Heraklion (Grecia) del 22 al 28 de septiembre de 2018.

Peer Reviewed