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Tailored Height Gradients in Vertical Nanowire Arrays via Mechanical and Electronic Modulation of Metal‐Assisted Chemical Etching

Authors: Otte Ortiz, Marinus Albertus; Solís Tinoco, Verónica Iraís; Prieto Recio, Pilar; Borrisé, Xavier; Lechuga, Laura M; González, María Ujué; Sepúlveda, Borja;

Tailored Height Gradients in Vertical Nanowire Arrays via Mechanical and Electronic Modulation of Metal‐Assisted Chemical Etching

Abstract

In current top‐down nanofabrication methodologies the design freedom is generally constrained to the two lateral dimensions, and is only limited by the resolution of the employed nanolithographic technique. However, nanostructure height, which relies on certain mask‐dependent material deposition or etching techniques, is usually uniform, and on‐chip variation of this parameter is difficult and generally limited to very simple patterns. Herein, a novel nanofabrication methodology is presented, which enables the generation of high aspect‐ratio nanostructure arrays with height gradients in arbitrary directions by a single and fast etching process. Based on metal‐assisted chemical etching using a catalytic gold layer perforated with nanoholes, it is demonstrated how nanostructure arrays with directional height gradients can be accurately tailored by: (i) the control of the mass transport through the nanohole array, (ii) the mechanical properties of the perforated metal layer, and (iii) the conductive coupling to the surrounding gold film to accelerate the local electrochemical etching process. The proposed technique, enabling 20‐fold on‐chip variation of nanostructure height in a spatial range of a few micrometers, offers a new tool for the creation of novel types of nano‐assemblies and metamaterials with interesting technological applications in fields such as nanophotonics, nanophononics, microfluidics or biomechanics.

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Spain
Keywords

Nanowires, Surface Properties, Electrical Equipment and Supplies, High aspect- ratio vertical nanowires, Metal assisted chemical etching, Biosensing Techniques, Electrochemical Techniques, Nanofabrication, Height gradients, High aspect-­ratio vertical nanowires, Biomechanical Phenomena, Nanostructures, Metamaterials, Microtechnology, Nanotechnology, Gold, Electronics

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
views
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7
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