Purpose: To investigate the difference in treatment plan quality of volumetric modulated arc treatment (VMAT) for esophageal carcinoma with flattening filter beam (FF) and flattening filter free beam (FFF). Material and methods: A total of fifty-six treatment plans were generated for twenty eight esophageal carcinoma patients with flattening filter beam and flattening filter free beam, using same optimal parameters. The homogeneity index (HI) and conformal index (CI) of targets, and some special points on Dose-Volume Histogram (DVH) curves were used to compare the plan quality. The coverage volumes of 45 Gy, 30 Gy and 20 Gy outside targets (V45Gy, V30Gy and V20Gy ) were used to compare the targets peripheral dose. The MU numbers, measured delivery time and averaged dose rates were used to evaluate the delivery efficiency of treatment plans. Results: A significant decreasing in peripheral dose around targets was found using FFF beams while the dose distributions in targets were equivalent to the plans with FF beams. V45Gy, V30Gy and V20Gy were decreased by 6.46%, 88.18% and 4.40%, respectively. A significant increase in MUs and decrease in treatment time were also found in delivery test. The average MUs was increased by 21.83% and the average treatment time was reduced by down to 11.9%. Conclusions: For esophageal carcinoma, the research showed that the treatment plans with FFF beams could get comparable dose distribution in targets and could significantly reduce the peripheral dose around targets compared to the plans with FF beams.