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Transactions on Electrical and Electronic Materials
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Transactions on Electrical and Electronic Materials
Article . 2006 . Peer-reviewed
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https://dx.doi.org/10.4313/tee...
Article
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Application of Potential-pH Diagram and Potentiodynamic Polarization of Tungsten

descriptionPublicationkeyboard_double_arrow_right Article 01 Jun 2006 English Publisher:The Korean Institute of Electrical and Electronic Material EngineersJournal:Transactions on Electrical and Electronic Materials, volume 7, pages 108-111 (issn: 1229-7607, Copyright policy )
Authors: Yong-Jin Seo; Sung-Woo Park; Woo-Sun Lee;

doi: 10.4313/teem.2006.7.3.108

Application of Potential-pH Diagram and Potentiodynamic Polarization of Tungsten

Abstract

The oxidizer-induced corrosion state and microstructure of surface passive metal-oxide layer greatly influenced on the removal rate of tungsten film according to the slurry chemical composition of different mixed oxidizers. In this paper, the actual polishing mechanism and pH-potential equilibrium diagram obtained from potentiodynamic polarization curve were electrochemically compared. An electrochemical corrosion effect implies that slurries with the highest removal rate (RR) have the high dissolution rate.

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    		 4
    popularity
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    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
4
Average
Average
Average
gold