Nanocrystalline ceria particles were prepared by using the ultrasonic spray pyrolysis method. The prepared ceria particles were found to be spherical and non-agglomerated by the SEM and TEM analyses. It was found that carrier gas influences the size and morphology. It was found that the air stream of carrier gas results in porous agglomerated structure of ceria abrasives, whereas solid nano-sphere can be obtained in a more oxidizing atmosphere.