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Light Advanced Manufacturing
Article . 2025
Data sources: DOAJ
Light Advanced Manufacturing
Article . 2025 . Peer-reviewed
Data sources: Crossref
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Integrated structure and sensorless feedback control of unimorph piezoelectric deformable mirrors

Authors: Dapeng Tian; Jian Chen; Ping Jia;

Integrated structure and sensorless feedback control of unimorph piezoelectric deformable mirrors

Abstract

Deformable mirrors are essential dynamic wavefront compensation. Among the various types of deformable mirrors with different actuation mechanisms, the unimorph piezoelectric deformable mirror (UPDM) offers distinct advantages owing to its compact size and low cost. The two most critical challenges in UPDM are electrode fabrication and deformation control. This study proposes an integrated electrode fabrication and sensorless feedback control scheme for UPDM, which simplifies the manufacturing process and enhances its performance. The electrode array is created using silkscreen printing combined with flexible printed circuit board technology, integrating electrode fabrication and electrical connection into a single step. The desired mirror deformation is achieved by introducing a closed-loop direct deformation control method based on piezoelectric self-sensing. The feedback mechanism utilizes the local strain-induced charge generated by the piezoelectric plate, effectively addressing the nonlinear behavior of the piezoelectric material. Experimental results confirm the feasibility and effectiveness of the proposed method, with the maximum relative error in the steady state phase remaining below 2%.

Keywords

feedback control, closed-loop, Manufactures, Applied optics. Photonics, sensorless feedback control scheme, TS1-2301, unimorph piezoelectric deformable mirror (pdm), TA1501-1820

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
gold