The increasing deployment of industrial robots in manufacturing requires accurate fault diagnosis. Online monitoring data typically consist of a large volume of unlabeled data and a small quantity of labeled data. Conventional intelligent diagnosis methods heavily rely on supervised learning with abundant labeled data. To address this issue, this paper presents a semi-supervised Informer algorithm for fault diagnosis modeling, leveraging the Informer model’s long- and short-term memory capabilities and the benefits of semi-supervised learning to handle the diagnosis of a small amount of labeled data alongside a substantial amount of unlabeled data. An experimental study is conducted using real-world industrial robot monitoring data to assess the proposed algorithm’s effectiveness, demonstrating its ability to deliver accurate fault diagnosis despite limited labeled samples.