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Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

Authors: Giannini D.; Bonaccorsi G.; Braghin F.;

Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

Abstract

In this paper, we propose a novel design and optimization environment for inertial MEMS devices based on a computationally efficient schematization of the structure at the a device level. This allows us to obtain a flexible and efficient design optimization tool, particularly useful for rapid device prototyping. The presented design environment—feMEMSlite—handles the parametric generation of the structure geometry, the simulation of its dynamic behavior, and a gradient-based layout optimization. The methodology addresses the design of general inertial MEMS devices employing suspended proof masses, in which the focus is typically on the dynamics associated with the first vibration modes. In particular, the proposed design tool is tested on a triaxial beating-heart MEMS gyroscope, an industrially relevant and adequately complex example. The sensor layout is schematized by treating the proof masses as rigid bodies, discretizing flexural springs by Timoshenko beam finite elements, and accounting for electrostatic softening effects by additional negative spring constants. The MEMS device is then optimized according to two possible formulations of the optimization problem, including typical design requirements from the MEMS industry, with particular focus on the tuning of the structural eigenfrequencies and on the maximization of the response to external angular rates. The validity of the proposed approach is then assessed through a comparison with full FEM schematizations: rapidly prototyped layouts at the device level show a good performance when simulated with more complex models and therefore require only minor adjustments to accomplish the subsequent physical-level design.

Countries
Italy, Belgium
Keywords

Technology, Inertial MEMS, GYROSCOPE, 0805 Distributed Computing, 4606 Distributed computing and systems software, TP1-1185, Structural optimization, Article, Analytical Chemistry, inertial MEMS, device-level MEMS schematization, Engineering, DESIGN, Device-level MEMS schematization, structural optimization, Instruments & Instrumentation, Science & Technology, 4008 Electrical engineering, Chemical technology, Beating-heart gyroscope, Chemistry, Analytical, Engineering, Electrical & Electronic, Chemistry, 0906 Electrical and Electronic Engineering, MEMS, 4009 Electronics, sensors and digital hardware, Physical Sciences, MEMS gyroscopes, beating-heart gyroscope, 0301 Analytical Chemistry

  • BIP!
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    selected citations
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    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    8
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Average
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Average
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
8
Top 10%
Average
Average
Green
gold