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Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

Authors: Frangi, Attilio; Guerrieri, Andrea; Boni, Nicoló;

Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

Abstract

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach.

Country
Italy
Keywords

comb-fingers, Chemical technology, parametric resonance, material derivative, electrostatic force and torque, TP1-1185, micromirrors, Article, Arc length algorithm; Comb-fingers; Continuation approach; Electrostatic force and torque; Electrostatic stiffness; Material derivative; Mathieu equation; Micromirrors; MOEMS; Parametric resonance; Analytical Chemistry; Atomic and Molecular Physics, and Optics; Biochemistry; Electrical and Electronic Engineering, MOEMS, Mathieu equation, continuation approach, arc length algorithm, electrostatic stiffness

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
12
Top 10%
Average
Top 10%
Green
gold