
Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach.
comb-fingers, Chemical technology, parametric resonance, material derivative, electrostatic force and torque, TP1-1185, micromirrors, Article, Arc length algorithm; Comb-fingers; Continuation approach; Electrostatic force and torque; Electrostatic stiffness; Material derivative; Mathieu equation; Micromirrors; MOEMS; Parametric resonance; Analytical Chemistry; Atomic and Molecular Physics, and Optics; Biochemistry; Electrical and Electronic Engineering, MOEMS, Mathieu equation, continuation approach, arc length algorithm, electrostatic stiffness
comb-fingers, Chemical technology, parametric resonance, material derivative, electrostatic force and torque, TP1-1185, micromirrors, Article, Arc length algorithm; Comb-fingers; Continuation approach; Electrostatic force and torque; Electrostatic stiffness; Material derivative; Mathieu equation; Micromirrors; MOEMS; Parametric resonance; Analytical Chemistry; Atomic and Molecular Physics, and Optics; Biochemistry; Electrical and Electronic Engineering, MOEMS, Mathieu equation, continuation approach, arc length algorithm, electrostatic stiffness
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