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Biosensors
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Biosensors
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Strain Plethysmography Using a Hermetically Sealed MEMS Strain Sensor

Authors: Xinyu Jiang; Brian Sang; Haoran Wen; Gregory Junek; Jin-Woo Park; Farrokh Ayazi;

Strain Plethysmography Using a Hermetically Sealed MEMS Strain Sensor

Abstract

We present a hermetically sealed capacitive microelectromechanical system (MEMS) strain sensor designed for arterial pulse waveform extraction using the strain plethysmography (SPG) modality. The MEMS strain sensor features a small form factor of 3.3 mm × 3.3 mm × 1 mm, leverages a nano-gap fabrication process to improve the sensitivity, and uses a differential sensing mechanism to improve the linearity and remove the common mode drift. The MEMS strain sensor is interfaced with an application-specific integrated circuit (ASIC) to form a compact strain sensing system. This system exhibits a high strain sensitivity of 316 aF/µε, a gauge factor (GF) of 35, and a strain sensing resolution of 1.26 µε, while maintaining a linear range exceeding 700 µε. SPG signals have been reliably captured at both the fingertip and wrist using the MEMS strain sensor with high signal quality, preserving various photoplethysmography (PPG) features. Experimental results demonstrate that heart rate (HR) and heart rate variability (HRV) can be estimated from the SPG signal collected at the fingertip and wrist using the sensor with an accuracy of over 99%. Pulse arrival time (PAT) and pulse transit time (PTT) have been successfully extracted using the sensor together with a MEMS seismometer, showcasing its potential for ambulatory BP monitoring (ABPM) application.

Related Organizations
Keywords

arterial pulse waveform, Blood Pressure, Biosensing Techniques, Micro-Electrical-Mechanical Systems, Pulse Wave Analysis, Article, Plethysmography, MEMS, cardiovascular disease, pulse transit time, Heart Rate, Humans, strain sensors, TP248.13-248.65, Biotechnology

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
Green
gold