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Biosensors
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Biosensors
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Biosensors
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A Flexible Pressure Sensor Based on Silicon Nanomembrane

Authors: Lixia Cheng; Xiaojian Hao; Guochang Liu; Wendong Zhang; Jiangong Cui; Guojun Zhang; Yuhua Yang; +1 Authors

A Flexible Pressure Sensor Based on Silicon Nanomembrane

Abstract

With advances in new materials and technologies, there has been increasing research focused on flexible sensors. However, in most flexible pressure sensors made using new materials, it is challenging to achieve high detection sensitivity across a wide pressure range. Although traditional silicon-based sensors have good performance, they are not formable and, because of their rigidity and brittleness, they are not suitable for fitting with soft human skin, which limits their application in wearable devices to collect various signals. Silicon nanomembranes are ultra-thin, flexible materials with excellent piezoresistive properties, and they can be applied in various fields, such as in soft robots and flexible devices. In this study, we developed a flexible pressure sensor based on the use of silicon nanomembranes (with a thickness of only 340 nm) as piezoresistive units, which were transferred onto a flexible polydimethylsiloxane (PDMS) substrate. The flexible pressure sensor operated normally in the range of 0–200 kPa, and the sensitivity of the sensor reached 0.0185 kPa−1 in the low-pressure range of 0–5 kPa. In the high-pressure range of 5–200 kPa, the sensitivity of the sensor was maintained at 0.0023 kPa−1. The proposed sensor exhibited a fast response and excellent long-term stability and could recognize human movements, such as the bending of fingers and wrist joints, while maintaining a stable output. Thus, the developed flexible pressure sensor has promising applications in body monitoring and wearable devices.

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Keywords

Silicon, Technology, silicon nanomembrane; polydimethylsiloxane (PDMS); transfer; flexible pressure sensor; sensitivity, Movement, silicon nanomembrane, Robotics, sensitivity, polydimethylsiloxane (PDMS), Article, flexible pressure sensor, Humans, transfer, TP248.13-248.65, Biotechnology, Skin

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
32
Top 10%
Top 10%
Top 1%
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gold