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Entre Ciencia e Ingeniería
Article . 2012 . Peer-reviewed
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Fabricación de Microestructuras

Authors: Darwin Rodríguez P.; Alejandro Godoy; Ruy Bonilla; Alba G Avila B;

Fabricación de Microestructuras

Abstract

One of the education challenges in microelectronics is to convey students the basic steps for electronic devices fabrication. This article introduces how rapid rototyping of planar coils combines photo-mask fabrication, photolithography and wet etching, and how it can be used for training at the undergraduate level. Low cost photo-masks are generated using printing master layouts of coil patterns designed with Inkscape and Adobe InDesign and transferred onto a photographic KODAK paper using a DeVere reduction copy camera. Three parameters are analyzed for transferring the layout onto the photomask and then onto an Al substrate: the camera’s reduction factor, the grain size of the Kodak paper and the quality of the InkJet photo-printer. Fabrication of submicron aluminum coils is achieved with optimization of these parameters. The hands-on experience on device fabrication impacts the students’ ability to comprehendinteractions between mask designs, fabrication and devices layout.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
gold