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https://doi.org/10.31438/trf.h...
Article . 2000 . Peer-reviewed
Data sources: Crossref
https://doi.org/10.1109/memsys...
Article . 2002 . Peer-reviewed
Data sources: Crossref
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A Micromachined Resonant Magnetic Field Sensor

Authors: T.C. Leichle; M. von Arx; M.G. Allen;

A Micromachined Resonant Magnetic Field Sensor

Abstract

A micromachined magnetic field sensor has been designed, fabricated and tested. Its principle of operation is based on the change of resonant frequency of a magnetically sensitive micromechanical resonator as a function of applied external magnetic field. Magnetic sensitivity is achieved by incorporating magnetically soft (permeable) or hard (permanent magnet) materials into the resonator structure. The fabrication of these devices is based on electroplating through sacrificial molds and is completely CMOS-compatible. The functionality of the device has been demonstrated as both an intensity sensor and an angular sensor (i.e., compass). The intensity sensor demonstrated a sensitivity of 20 Oersted in magnetic field intensity, while the angular sensor demonstrated a resolution of approximately 20 degrees. Performance improvements are expected upon integration of these devices with appropriate circuitry.

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    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
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    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Average
Average
bronze