Abstract In this paper, atmospheric plasma spraying is used to produce metal-insulator-metal structures that emit ultraviolet light via electrical discharge when sufficient voltage is applied. The metal layers are sprayed with molybdenum alloy powders and the insulator, a 50 to 100 μm dielectric layer, is sprayed with zirconia powder. The authors describe the fabrication process, assess the characteristics of the layers, and present test results that quantify the radiant power of the emitted UV light. Output power and efficiency of the plasma-sprayed structures are compared with that of commercial excimer lamps and the effects of coating erosion due to electrical discharge are discussed. Paper includes a German-language abstract.