Abstract In reliability test some chips suffered functional failure. Through a series of failure analysis experiments, the root cause was determined to be a silicon dislocation across LDD (Lightly Doped Drain) area causing p-n junction leakage. However, those failed samples all passed both CP (Chip Probe) and FT (Final Test) monitor. Therefore, it is reasonable to suspect that DVS (dynamic voltage stress) may enhance minor dislocations already existing before CP and FT. To prove this hypothesis, an experiment was designed to find the relationship between DVS and the depth of dislocation in silicon substrate. In conclusion, DVS could enhance dislocation across LDD area, which may induce reliability failure. Moreover, reliability concerns on this finding will be discussed in this paper.