The monodispersed titania particles were prepared by the hydrolysis of titania tetra-ethoxide in a alcolic solution. The effect of heat treatment and hydrothermal treatment on the obtained monodipersed titania particles were examined by means of TEM, XRD, TG-DTA and BET.The obtained titanis particles was amorphous titanis was crystallized to anatase type at 400°C, and was transfered to rutile type at 900°C. By autoclave treatment, the transfer of anatase type from amorphous titania was occurred at lower temperature as 150°C, and a part of titania particles were broken at higher temperature as 250°C.