A hybrid process, which combines electron beam selective melting(EBSM) and selective laser melting(SLM), is proposed in this study. Laser is led into the vacuum chamber through the lens so that laser can be used to fabricate the metal powder at the same time with electron beam. In this study, Laser is used to pre-preheat the metal powder in order to preventing powder spreading and laser is also used to fabricate the contour of the parts both inside and outside. Electron beam is used to preheat the metal powder to the specified temperature and to fabricate the interior of the parts. It can be sure that through the hybrid process we can fabricate the parts with both better surface quality, higher precision and higher efficiency. Ti6Al4V samples were fabricated by selective electron beam and laser hybrid melting. The surface roughness of the parts was measured, the microstructures of the contour and interior were characterized using scanning electron microscopy (SEM). The results are that as-fabricated parts have better surface quality than the parts fabricated only using EBM process.