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The Review of Laser Engineering
Article . 1992 . Peer-reviewed
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The Review of Laser Engineering
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https://dx.doi.org/10.2184/lsj...
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High Beam Quality ArF Excimer Lasers.

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 1992 English Publisher:Laser Society of JapanJournal:The Review of Laser Engineering, volume 20, pages 75-85 (issn: 0387-0200, eissn: 1349-6603, Copyright policy )
Authors: Yasuo ITAKURA; Ryoichi NODOMI; Masao KAKIMOTO;

doi: 10.2184/lsj.20.2_75

High Beam Quality ArF Excimer Lasers.

Abstract

The present status and recent efforts toward high beam quality ArF excimer laser, including the authors' experimental results, are reviewed with respect to spectral narrowing, spatial coherence, and high power operation. High-beam quality KrF lasers are also reported for comparison.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
gold