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Multilayered plating thickness measurement

Authors: Russell, R. J.;

Multilayered plating thickness measurement

Abstract

A nondestructive method for measuring multilayered plating thickness has been developed utilizing intensity measurements made with an x-ray fluorescence spectrometer. A series of multilayered platings was fabricated, and the thickness of each was determined through the use of a Link gage block interferometer. These samples were used in experiments to determine the absorption and enhancement effects that are present when an x-ray fluorescence spectrometer is used to measure the thickness of a multilayered plating. The results of the investigation indicated that enhancement corrections must be applied to x-ray measurements of gold thickness up to 20 microinches (508 nm). The effect of absorption of the rhodium K-Alpha line in the gold layer was found to have an insignificant effect on the measurement of rhodium thickness; corrections are not needed. Present technology results in an ability to detect a 1-microinch (25.4 nm) change in gold thickness with an estimated calibration uncertainty (bias) of +-4 microinches (+-101.6 nm). The thickness of the rhodium underplate can be determined with an estimated uncertainty of +-10 microinches (254 nm). Additional work is being performed to establish confidence in the plating-thickness measurement method that has been developed.

Country
United States
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Keywords

Refractory Metals, Thickness Gages, Performance, Equipment, Dimensions, Measuring Methods, Uses, Nickel, Coatings, Plating, 42 Engineering, Rhodium, Emission Spectroscopy, Deposition, Spectroscopy, Spectrometers, X-Ray Spectrometers, & Techniques, Fluorescence Spectroscopy, Elements, Measuring Instruments, Metals, Surface Coating, Gold, Platinum Metals, Layers, Thickness, Transition Elements 420200* -- Engineering-- Facilities

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average