
doi: 10.2172/5343615
A linear-induction-motor drive system to position machine tool slides has been developed on a test bed that utilizes an air-bearing slide, laser interferometer feedback, and a microprocessor-based servo system. Static and dynamic positioning accuracies of +-16 nm (+-0.6 .mu.in) have been demonstrated.
Design, Performance Testing, 42 Engineering, Testing 420200* -- Engineering-- Facilities, Motors, Equipment, & Techniques, Control Systems, Electric Motors, Machine Tools, Accuracy
Design, Performance Testing, 42 Engineering, Testing 420200* -- Engineering-- Facilities, Motors, Equipment, & Techniques, Control Systems, Electric Motors, Machine Tools, Accuracy
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