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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Ultrasonics
Article . 2025 . Peer-reviewed
License: Elsevier TDM
Data sources: Crossref
https://doi.org/10.2139/ssrn.5...
Article . 2025 . Peer-reviewed
Data sources: Crossref
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Characterization of Multilayer Films Using Ultrafast Photoacoustic Technology and Artificial Intelligence

Authors: Zhiheng Chen; Hongyuan Zhao; Yueying Hou; Enrui Zhang; Sicheng Yan; Junheng Yao; Xiaodong Xu; +3 Authors

Characterization of Multilayer Films Using Ultrafast Photoacoustic Technology and Artificial Intelligence

Abstract

A high-precision nanoscale characterization technology for multilayer films is critical in microelectronics, optoelectronics and bio-medicine. Ultrafast photoacoustic technology provides non-contact structural profiling with sub-nanometer resolution. In this study, an advanced scheme combining ultrafast photoacoustic method and Artificial Intelligence (AI) is applied to automatically measure the thicknesses and crystal orientations of multilayer thin films and superlattices. We developed a dataset using a multilayer photoacoustic theoretical model consistent with experimental results. To mitigate experimental noise, we applied a variational mode decomposition (VMD)-backpropagation neural network (BPNN) algorithm and an AlexNet framework for samples properties prediction. Characterization results in SiO2, LiNbO3 multilayers and GaAs/AlAs superlattices verify that this AI-based scheme can automatically get the knowledge of multiple properties with a higher precision in principle. This method enables tomographic detection of complex nanostructures and offers a novel approach for real-time monitoring of integrated devices and biomedical imaging.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
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