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Thin Solid Films
Article . 2024 . Peer-reviewed
License: CC BY
Data sources: Crossref
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Article . 2024
License: CC BY
Data sources: HAL-CEA
https://doi.org/10.2139/ssrn.4...
Article . 2024 . Peer-reviewed
Data sources: Crossref
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Sputtered Niobium Pentoxide Layers for Optical Applications

Authors: Massoni, N.; Nistor, L.E.; Licitra, C.; Nolot, E.; Rodriguez, G.;

Sputtered Niobium Pentoxide Layers for Optical Applications

Abstract

The use of pulsed DC magnetron sputtered niobium pentoxide as a high index material in optical devices as Anti-Reflecting Coating (ARC) and optical filters has been investigated. When deposited on a silicon substrate with native oxide, the few nanometers of niobium pentoxide were optically distinct from the rest of the niobium pentoxide layer, effect not observed on thermally oxidized silicon substrates. The dispersion curve of this interfacial layer was determined and used to simulate the reflectometry curves. Next, an ARC consisting of a bilayer of niobium pentoxide and silica was fabricated and its optical response was simulated with this interfacial layer. Finally, a Bragg mirror consisting of seventeen layers of niobium pentoxide and silicon dioxide was realized, underlining that this interfacial layer does not affect the optical response when several layers were at stake.

Country
France
Keywords

[PHYS.MECA.SOLID] Physics [physics]/Mechanics [physics]/Solid mechanics [physics.class-ph], [PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], Niobium oxide, [SPI] Engineering Sciences [physics], Bragg mirror, Sputtering, Image sensors

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    popularity
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    influence
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
Green
hybrid