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Low Voltage Electron Beam Lithography

Authors: R. F. Pease; R. Browning;

Low Voltage Electron Beam Lithography

Abstract

Abstract : In order to measure the energy spread of electrons emitted from various negative electron affinity cathode structures, a simple apparatus using a uniform retarding field inside night vision tubes and customized tubes (all made by Intevac) was constructed and initial measurements performed. GaAs and GaAsP photocathodes with CsO activations were measured. Energy spreads as low as 100meV were observed from a low quantum efficiency GaAs cathode. An extremely sharp (30meV width) vacuum-level cutoff in the energy distribution from the GaAsP was observed. These two results show both the possible energy resolution of the technique and the energy spreads achievable from negative electron affinity photocathodes. Energy distribution variation indicated the importance of scattering in the band-bending region, and thus suggested the possibility of heterostructure and doping variation at the surface to minimize the energy spread. A design for an optimum cathode was developed.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
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