Abstract : There is considerable interest in using diamond for numerous applications because of the development of methods that allow for the deposition of diamond by chemical vapor deposition (CVD) techniques over large areas. The interest in new applications for diamond rests on combinations of superior properties that diamond possesses. These extreme properties, which are based on measurements in bulk single crystal diamond, include greatest hardness, highest elastic moduli, and highest thermal conductivity at room temperature of any material. Other important properties include optical transparency over an extensive wavelength range from the ultraviolet through the far infrared, high electrical resistivity, dopability to be a semiconductor, low permeability to diffusion, chemical inertness, and low coefficient of friction.