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Травление Ð³Ñ€ÐµÐ±Ð½ÐµÐ²Ñ‹Ñ Ð²Ð¾Ð»Ð½Ð¾Ð²Ð¾Ð´Ð¾Ð² Ð¿Ð¾Ð»ÑƒÐ¿Ñ€Ð¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð²Ñ‹Ñ Ð»Ð°Ð·ÐµÑ€Ð¾Ð² сфокусированным пучком ионов

выпускная квалификационная работа бакалавра
descriptionPublicationkeyboard_double_arrow_right Other literature type 01 Jan 2021 Russian Publisher:Санкт-Петербургский политехнический университет Петра Великого

doi: 10.18720/spbpu/3/2021/vr/vr21-5101

Травление Ð³Ñ€ÐµÐ±Ð½ÐµÐ²Ñ‹Ñ Ð²Ð¾Ð»Ð½Ð¾Ð²Ð¾Ð´Ð¾Ð² Ð¿Ð¾Ð»ÑƒÐ¿Ñ€Ð¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð²Ñ‹Ñ Ð»Ð°Ð·ÐµÑ€Ð¾Ð² сфокусированным пучком ионов

Abstract

В работе были получены основные характеристики полупроводниковых лазеров до травления и после. На основе полученных результатов был проведён анализ влияния травления волновода на основные характеристики лазеров.

In this work the basic characteristics of semiconductor lasers before milling and after it were obtained. Based on the results the influence of waveguide milling on the main characteristics of lasers was obtained.

Keywords

focused ion beam, wavegude, волновод, полупроводниковый лазер, semiconductor laser, сфокусированный ионный пучок

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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