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Исследование потери устойчивости для нелинейной Ð¼Ð¸ÐºÑ€Ð¾Ð¼ÐµÑ Ð°Ð½Ð¸Ñ‡ÐµÑÐºÐ¾Ð¹ структуры

научный доклад
descriptionPublicationkeyboard_double_arrow_right Other literature type 01 Jan 2018 Russian Publisher:Санкт-Петербургский политехнический университет Петра Великого

doi: 10.18720/spbpu/2/va19-5

Исследование потери устойчивости для нелинейной Ð¼Ð¸ÐºÑ€Ð¾Ð¼ÐµÑ Ð°Ð½Ð¸Ñ‡ÐµÑÐºÐ¾Ð¹ структуры

Abstract

Научный доклад посвящён разработке конструкции, методов управления и технологии изготовления нелинейных микромеханических структур с потерей устойчивости.В рамках работы были получены новые данные о механических свойствах тонкопленочных металлических композиций и динамическом поведении нелинейных микросистем.Теоретические данные,полученные в ходе численного моделирования поведения нелинейных микромеханических элементов,подтверждаются экспериментально на изготовленных прототипах устройств. Полученные результаты дают возможность совершенствования технологических и конструкционных методов проектирования и изготовления устройств микросистемной техники.

Keywords

Колебания, Микроэлектронная аппаратура, Пленки тонкие, Упругие системы, микросистемная Ñ‚ÐµÑ Ð½Ð¸ÐºÐ°, Микроэлектронные ÑÑ ÐµÐ¼Ñ‹ интегральные

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
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