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Контроль герметичности вакуумной аппаратуры

выпускная квалификационная работа магистра
descriptionPublicationkeyboard_double_arrow_right Other literature type 01 Jan 2018 Russian Publisher:Санкт-Петербургский политехнический университет Петра Великого

doi: 10.18720/spbpu/2/v18-4607

Контроль герметичности вакуумной аппаратуры

Abstract

Данная работа посвящена проблеме контроля герметичности вакуумной аппаратуры, повышению чувствительности и точности определения величины течи. Рассмотрены существующие способы, методы и Ñ‚ÐµÑ Ð½Ð¸Ñ‡ÐµÑÐºÐ¸Ðµ средства контроля герметичности. Разработаны методики контроля герметичности при помощи ÐºÐ²Ð°Ð´Ñ€ÑƒÐ¿Ð¾Ð»ÑŒÐ½Ñ‹Ñ Ð°Ð½Ð°Ð»Ð¸Ð·Ð°Ñ‚Ð¾Ñ€Ð¾Ð² Ð¿Ð°Ñ€Ñ†Ð¸Ð°Ð»ÑŒÐ½Ñ‹Ñ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ð¹, конструкция установки контроля герметичности, проведены экспериментальные исследования Ñ Ð°Ñ€Ð°ÐºÑ‚ÐµÑ€Ð¸ÑÑ‚Ð¸Ðº установки.

Keywords

Течеискатели, Вакуумная Ñ‚ÐµÑ Ð½Ð¸ÐºÐ°, герметичность, Масс-спектрометры

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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