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ÐŸÐ»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ‡ÐµÑÐºÐ¸Ðµ процессы и оборудование

учебное пособие
descriptionPublicationkeyboard_double_arrow_right Other literature type 01 Jan 2012 Russian Publisher:Изд-во Политехн. ун-та

doi: 10.18720/spbpu/2/si20-676

ÐŸÐ»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ‡ÐµÑÐºÐ¸Ðµ процессы и оборудование

Abstract

Данное учебное пособие предназначено для сотрудников предприятий, Ð·Ð°Ð½ÑÑ‚Ñ‹Ñ Ñ€Ð°Ð·Ñ€Ð°Ð±Ð¾Ñ‚ÐºÐ¾Ð¹ и изготовлением Ð¿Ð»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ‡ÐµÑÐºÐ¾Ð³Ð¾ оборудования для повышения Ð¸Ñ ÐºÐ²Ð°Ð»Ð¸Ñ„Ð¸ÐºÐ°Ñ†Ð¸Ð¸ путем приобретения компетенций в области Ð¿Ð»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ‡ÐµÑÐºÐ¸Ñ Ñ‚ÐµÑ Ð½Ð¾Ð»Ð¾Ð³Ð¸Ð¹ травления и осаждения материалов электронной и микросистемной Ñ‚ÐµÑ Ð½Ð¸ÐºÐ¸. Пособие может быть полезно студентам ÑÑ‚Ð°Ñ€ÑˆÐ¸Ñ ÐºÑƒÑ€ÑÐ¾Ð², Ð¾Ð±ÑƒÑ‡Ð°ÐµÐ¼Ñ‹Ñ Ð² Ñ€Ð°Ð¼ÐºÐ°Ñ Ð½Ð°Ð¿Ñ€Ð°Ð²Ð»ÐµÐ½Ð¸Ð¹ «Наноматериалы» и «Материаловедение и Ñ‚ÐµÑ Ð½Ð¾Ð»Ð¾Ð³Ð¸Ñ материалов» по профилям, относящимся к Ñ‚ÐµÑ Ð½Ð¾Ð»Ð¾Ð³Ð¸Ð¸ изделий микроэлектроники и микросистемной Ñ‚ÐµÑ Ð½Ð¸ÐºÐ¸. Ð’ настоящем учебном пособии обсуждаются принципы построения Ð¿Ð»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ‡ÐµÑÐºÐ¾Ð³Ð¾ оборудования, основанного на использовании низкотемпературной плазмы, создаваемой с помощью Ð³Ð°Ð·Ð¾Ð²Ñ‹Ñ Ñ€Ð°Ð·Ñ€ÑÐ´Ð¾Ð² при Ð¿Ð¾Ð½Ð¸Ð¶ÐµÐ½Ð½Ñ‹Ñ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸ÑÑ , основы процессов травления Ð¼Ð¸ÐºÑ€Ð¾ÑÐ»ÐµÐºÑ‚Ñ€Ð¾Ð½Ð½Ñ‹Ñ ÑÑ‚Ñ€ÑƒÐºÑ‚ÑƒÑ€, закономерности процессов Ð¿Ð»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ‡ÐµÑÐºÐ¾Ð³Ð¾ травления и примеры Ð¸Ñ Ð¸ÑÐ¿Ð¾Ð»ÑŒÐ·Ð¾Ð²Ð°Ð½Ð¸Ñ для травления Ñ€Ð°Ð·Ð½Ð¾Ð¾Ð±Ñ€Ð°Ð·Ð½Ñ‹Ñ Ð¼Ð°Ñ‚ÐµÑ€Ð¸Ð°Ð»Ð¾Ð², а также Ð¿Ð»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ‡ÐµÑÐºÐ¸Ðµ процессы осаждения слоев на примере нитрида кремния, как Ð¾Ð´Ð½Ð¸Ñ Ð¸Ð· наиболее ÑÐ»Ð¾Ð¶Ð½Ñ‹Ñ Ð¸ Ñ‚Ñ€ÑƒÐ´Ð½Ñ‹Ñ Ð´Ð»Ñ практической реализации.

Печатается по решению редакционно-издательского совета Санкт-Петербургского государственного Ð¿Ð¾Ð»Ð¸Ñ‚ÐµÑ Ð½Ð¸Ñ‡ÐµÑÐºÐ¾Ð³Ð¾ университета.

Keywords

ÐŸÐ»Ð°Ð·Ð¼Ð¾Ñ Ð¸Ð¼Ð¸Ñ, Вакуумное оборудование

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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Average
Average
Average
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