By measurement of microhardness of silver layer on polyimide films and its reduction after removing the stress, the depth of silver distribution in the polyimide films was calculated. A significant hardening of Kapton 100 HN films was observed especially for cobalt-impregnated materials, which was about 10 µm. The distribution of silver in the film layers was obviously deeper that manifested as entirely lower hardening at microhardness measurement. Because of the initial microhardness of Upilex it was observed strong hardening of the effort, which was led to shallow distribution of metals in the films. For example, Cometallized films showed 5 µm distribution in the top film layers. Such method could allow precisely and rapidly estimating the distribution of metal particles impregnated in metallized polymeric materials.