AbstractPolytetrafluoroethylene(PTFE), Polyvinylidene fluoride(PVFD), and Polymethylmethacrylate(PMMA) thin films have been bombarded with a H2 ion beam. The ion exposure time varied from 3 to 12 minutes corresponding to an ion dose of 1017H+/cm2 to 1018H+/cm2. ESCA spectra showed that the fluorine intensity from the fluorocarbon polymers decreased after H2 ion bombardment. Also the CF2 type bond groups observed in the fluorocarbon polymers decreased leaving only the hydrocarbon type bond groups (CH2) after H2 ion bombardment. We speculate that the hydrogen atoms abstract fluorine from the polymer which decreases the fluorine concentration. ESCA has been used to determine the effect of chemical vs. inert (H2 vs. He) ion bombardment on fluorocarbon polymers as a function of exposure time. The implication of these results to explain the differences between RIE and RIBE deposited polymers will be discussed.