ABSTRACTA major challenge in developing computer models for crevice corrosion lies in fabricating appropriate experimental crevice samples. The geometry and dimensions of these samples must be controlled to a high order of precision in order to be amenable for comparison to computational models. In this work we report an effort to construct crevice samples with rigorously defined dimensions by using microfabrication techniques developed for microelectromechanical systems (MEMS). These techniques include microfabrication with SU- 8, electroplating, and other standard semiconductor device fabrication techniques as well. The crevice substrates contain one-dimensional arrays of metal electrodes to be studied, which are isolated by walls of SU-8. The electrodes have individual electrical connections so that spatial information of the in-situ corrosion process can be obtained. The crevice formers with SU-8 posts were coupled to crevice substrates to maintain a uniform crevice gap. Further, crevice formers with regular rectangular subcrevices were fabricated to study the roles of subcrevices in crevice corrosion.