Polycrystalline Silicon as a Mechanical Material

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 1990 English Publisher:Springer Science and Business Media LLCJournal:MRS Proceedings, volume 182 (issn: 0272-9172, eissn: 1946-4274,

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Authors: Richard S. Muller;

doi: 10.1557/proc-182-245

Polycrystalline Silicon as a Mechanical Material

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Abstract

In 1982, Kurt Petersen published “Silicon as a Mechanical Material” in the Proceedings of the IEEE. This thorough review article heightened focus on the advantages of utilizing the mechanical as well as electrical properties of single-crystal silicon. Processes for shaping single-crystal silicon based upon selective etching were shown in the article to make silicon useful for a variety of miniature mechanical devices.

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University of California, Berkeley
United States

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